Part number: C002-X-96-CP

Datasheet

Complete vacuum wand including tip for wafer handling. ESD safe conductive nylon body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 6 inch (150 mm) wafer handling. With conductive PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Normally open push-button valve (press to release the wafer).
• A resistance value of 10⁶ to 10⁸ ohms provides optimum static protection
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: C002-X-97-CP

Datasheet

Complete vacuum wand including tip for wafer handling. ESD safe conductive nylon body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 8 inch (200 mm) wafer handling. With conductive PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Normally open push-button valve (press to release the wafer).
• A resistance value of 10⁶ to 10⁸ ohms provides optimum static protection
• Tip may be swivelled up to 30° and locked
• Gross weight: 95 g

Part number: C002-Y-91-CP

Datasheet

Complete vacuum wand including tip for wafer handling. ESD safe conductive nylon body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip is securely fixed to the wand. Suitable for up to 6 inch (150 mm) wafer handling. With conductive PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Normally open push-button valve (press to release the wafer).
• A resistance value of 10⁶ to 10⁸ ohms provides optimum static protection
• Gross weight: 70 g

Part number: C002-Y-92-CP

Datasheet

Complete vacuum wand including tip for wafer handling. ESD safe conductive nylon body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip is securely fixed to the wand. Suitable for up to 8 inch (200 mm) wafer handling. With conductive PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Normally open push-button valve (press to release the wafer).
• A resistance value of 10⁶ to 10⁸ ohms provides optimum static protection
• Gross weight: 95 g

Part number: C002-Y-98-CP

Datasheet

Complete vacuum wand including tip for wafer handling. ESD safe conductive nylon body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip is securely fixed to the wand. Suitable for up to 8 inch (200 mm) wafer handling. With conductive PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Normally open push-button valve (press to release the wafer).
• A resistance value of 10⁶ to 10⁸ ohms provides optimum static protection
• Extended length tip, 128 mm long
• Gross weight: 95 g

Part number: C002-X

Part number: C002-Y

Part number: 91-CP

Replacement tip for 6 inch (150 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 92-CP

Replacement tip for 8 inch (200 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 96-CP

Replacement tip for 6 inch (150 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 97-CP

Replacement tip for 8 inch (200 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 98-CP

Replacement tip for 8 inch (200 mm wafer handling). ESD safe conductive PEEK (TIP ONLY).

Part number: 658

Vertical wall mount holder for all normally open wands. Vacuum is isolated (switched off) while the wand is in the stand. Fixing is by self-adhesive pad, or alternatively this can be removed to use the two countersunk fixing holes. Material: acrylic resin.

Part number: 659

Horizontal desktop holder for all normally open wands. Vacuum is isolated (switched off) while the wand is in the stand. Material: acrylic resin.

Part number: 851-M

Black, coiled flexible tubing. Extends easily to over 2 m. Can be used with any wand. ESD safe when used with C series wands. 3 mm ID, 5 mm OD. Note that our wands accept both 3 and 4 mm ID tubing.

Part number: 851-L

Black, coiled flexible tubing. Extends easily to over 2 m. Can be used with any wand. ESD safe when used with C series wands. 4 mm ID, 6 mm OD. Note that our wands accept both 3 and 4 mm ID tubing.

Part number: FV-30-240

Datasheet

The FV-30 is our mid-range vacuum pump. It is capable of safely handling up to 6 inch (150 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. Supplied with 1 m clear flexible vacuum tubing.

• Flow rate 2.5 l/min (0.088 cfm)
• Ultimate pressure -300 mmHg (-40 kPa)
• Power supply 240 VAC
• Built in inlet and outlet HEPA filters
• Built in inlet and outlet HEPA filters
• Oil-free for cleanroom use
• Long term high reliability Designed to minimize noise generation
• Nylon body for static protection
• Compact design
• ESD Safe Tubing (Accessory)
• Static-Dissipative Grounding Kit (Accessory)
• HEPA Filter Kit (Replacement Part)
• Compliance with CE regulations
• HEPA filters trap 99.97% of all particles down to 0.3 microns
• The FIlter windows indicate when to change HEPA filters
• Gross weight: 860 g

Part number: FV-60-240

Datasheet

The FV-60 is our largest clean room vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil-free for use in the cleanroom and designed for long term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.

• Flow rate 2.5 l/min (0.088 cfm)
• Ultimate pressure –600 mmHg (–80 kPa)
• Power supply 240 Vac
• Built in inlet and outlet
• HEPA filters
• Nylon body for static protection
• Compact design
• ESD safe tubing (accessory)
• Static dissipative grounding kit (accessory)
• HEPA filter kit (replacement part)
• Compliance with CE regulations
• HEPA filters trap 99.97% of all particles down to 0.3 microns
• The filter windows indicate when to change HEPA filters
• Gross weight: 1400 g

Part number: 858

ESD grounding kit for all vacuum pumps.

Part number: 901

Vacuum wand tip condition tester. Wand tips can become less efficient with use if the contact surface deteriorates due to minute scratches, etc. This device can be used to check that the wand is performing correctly. The tip contact parts are made of PPS (polyphenylsulphide).