Semiconductor wafer handling

These wands are the safest means of wafer handling, and are offered in both PTFE and ESD safe materials. The tips are optimally sized for each wafer diameter, and their design ensures that contact is both minimal and secure. The contact surface itself is optically polished, providing excellent adhesion to a wafer. Tips are available in PCTFE, PEEK and Vespel. Two body styles are available, fixed tip and swivel joint, offering a choice of handling techniques. Our unique wand control valve ensures reliable suction and instantaneous release without particle generation.


Part number Description
Complete wands
F002-X-01-3FPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, PCTFE tip
F002-X-01-PKPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, PEEK tip
F002-X-01-VPPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, Vespel tip
F002-X-03-3FPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, PCTFE tip
F002-X-03-PKPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, PEEK tip
F002-X-03-VPPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, Vespel tip
F002-X-05-PKPTFE vacuum wand for up to 8 inch (200 mm) wafers, normally open, swivel, PEEK tip
F002-X-05-VPPTFE vacuum wand for up to 8 inch (200 mm) wafers, normally open, swivel, Vespel tip
F002-X-09-3FPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, PCTFE tip
F002-X-09-PKPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, PEEK tip
F002-X-09-VPPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, swivel, Vespel tip
F002-Z-03-3FPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, PCTFE tip
F002-Z-03-PKPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, PEEK tip
F002-Z-03-VPPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, Vespel tip
F002-Z-05-VPPTFE vacuum wand for up to 8 inch (200 mm) wafers, normally open, Vespel tip
F002-Z-09-3FPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, PCTFE tip
F002-Z-09-PKPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, PEEK tip
F002-Z-09-VPPTFE vacuum wand for up to 6 inch (150 mm) wafers, normally open, Vespel tip
F002-Z-05-PKPTFE vacuum wand for up to 8 inch (200 mm) wafers, normally open, PEEK tip
Wand bodies
F002-XPTFE vacuum wand body without tip, normally open, swivel
F002-YPTFE vacuum wand for tip type Y, normally open, no tip
F002-ZPTFE vacuum wand body without tip, rotate and lock, normally open
Tips
01-PKPEEK tip for up to 6 inch (150 mm) wafers, X or Z connection
01-VPVespel tip for up to 6 inch (150 mm) wafers, X or Z connection
03-PKPEEK tip for up to 6 inch (150 mm) wafers, X or Z connection
03-VPVespel tip for up to 6 inch (150 mm) wafers, X or Z connection
05-PKPEEK tip for up to 8 inch (200 mm) wafers, X or Z connection
05-VPVespel tip for up to 8 inch (200 mm) wafers, X or Z connection
09-PKPEEK tip for up to 6 inch (150 mm) wafers, X or Z connection
09-VPVespel tip for up to 6 inch (150 mm) wafers, X or Z connection
91-CPESD safe conductive PEEK tip for up to 6 inch (150 mm) wafers, Y type fixed joint
92-CPESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, Y type fixed joint
96-CPESD safe conductive PEEK tip for up to 6 inch (150 mm) wafers, for swivel joint, X or Z connection
97-CPESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, for swivel joint, X or Z connection
98-CPESD safe conductive PEEK tip for up to 8 inch (200 mm) wafers, fixed joint Y, extended
11-PKPEEK tip for up to 6 inch (150 mm) wafers, Y connection
Accessories
658Vertical wall mount stand for normally open wand, with vacuum shut-off
659Horizontal desktop stand for normally open wand, with vacuum shut-off
851-MCoiled ESD safe tubing, 3 mm ID, 5 mm OD, 2 m, relaxed
851-LCoiled ESD safe tubing, 4 mm ID, 6 mm OD, 2 m, relaxed
FV-30-240Clean room vacuum pump, 300 mmHg, 2.5 l/min, 240 V, HEPA
FV-60-240Clean room vacuum pump, 600 mmHg, 2.5 l/min, 240 V, HEPA
858Static dissipative grounding kit for FV-10/30/60 pumps
901Vacuum leak detector and wafer wand tip condition tester