Part number: F002-X-03-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 6 inch (150 mm) wafer handling. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: F002-X-03-PK

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 6 inch (150 mm) wafer handling. With PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: F002-X-03-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 6 inch (150 mm) wafer handling. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: F002-X-05-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 8 inch (200 mm) wafer handling. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 95 g

Part number: F002-X-05-PK

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 8 inch (200 mm) wafer handling. With PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 95 g

Part number: F002-X-05-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. Suitable for up to 8 inch (200 mm) wafer handling. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 95 g

Part number: F002-X-09-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: F002-X-09-PK

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. With PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: F002-X-09-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated, and swivelled up to 30°, and locked. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Tip may be swivelled up to 30° and locked
• Gross weight: 70 g

Part number: F002-Y-14-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip is securely fixed to the wand. Suitable for up to 8 inch (200 mm) wafer handling. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 95 g

Part number: F002-Y-14-PK

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip is securely fixed to the wand. Suitable for up to 8 inch (200 mm) wafer handling. With PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 95 g

Part number: F002-Y-74-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip is securely fixed to the wand. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 200 g

Part number: F002-Z-03-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. Suitable for up to 6 inch (150 mm) wafer handling. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 70 g

Part number: F002-Z-03-PK

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. Suitable for up to 6 inch (150 mm) wafer handling. With PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 70 g

Part number: F002-Z-03-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. Suitable for up to 6 inch (150 mm) wafer handling. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 70 g

Part number: F002-Z-05-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. Suitable for up to 8 inch (200 mm) wafer handling. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 95 g

Part number: F002-Z-05-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. Suitable for up to 8 inch (200 mm) wafer handling. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 95 g

Part number: F002-Z-09-3F

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. With PCTFE tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 70 g

Part number: F002-Z-09-PK

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. With PEEK tip. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 70 g

Part number: F002-Z-09-VP

Datasheet

Complete vacuum wand including tip for wafer handling. PTFE body. Normally open push-button valve (press to release the wafer). Vacuum is automatically switched off when placed in stand 658 or 659. The tip can be rotated and locked in position. With Vespel tip for continuous use up to 288°C. Wand body and tip available separately. The vacuum tube connector allows push-on connection to any flexible tubing from 2.5 mm to 4 mm ID. The tube connector has a quick connection feature that allows wands to be interchanged rapidly.

• Teflon (PTFE) provides excellent chemical resistance
• Normally open push-button valve (press to release the wafer).
• Gross weight: 70 g

Part number: F002-X

Vacuum wand for wafer handling with PTFE (Teflon) body. Without tip. Normally open valve operation (press button to pick up the wafer). X style tip extension allows the tip to be rotated and swivelled up to 30° and then locked in position for use.

Part number: F002-Y

Vacuum wand for wafer handling with PTFE (Teflon) body. Without tip. Normally closed valve operation (press button to release the wafer). Ready for Y style fixed tips.

Part number: F002-Z

PTFE vacuum wand without tip, normally open (press to release the wafer); rotate and lock style.

Part number: 01-3F

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a PCTFE tip for use with F series wands having an X or Z connection. Dimensions 26 x 15 mm, thickness 2.5 mm. Push-on fitting.

Part number: 01-PK

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a PEEK tip for use with F series wands having an X or Z connection. Dimensions 26 x 15 mm, thickness 2.5 mm. Push-on fitting. Note: PCTFE type shown.

Part number: 01-VP

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a Vespel tip for use with F series wands having an X or Z connection. Dimensions 26 x 15 mm, thickness 2.5 mm. Push-on fitting. Note: PCTFE type shown.

Part number: 03-3F

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a PCTFE tip for use with F series wands having an X or Z connection. Dimensions 31 x 26 mm, thickness 2.5 mm. Push-on fitting.

Part number: 03-PK

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a PEEK tip for use with F series wands having an X or Z connection. Dimensions 31 x 26 mm, thickness 2.5 mm. Push-on fitting. Note: PCTFE type shown.

Part number: 03-VP

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a Vespel tip for use with F series wands having an X or Z connection. Dimensions 31 x 26 mm, thickness 2.5 mm. Push-on fitting. Note: PCTFE type shown.

Part number: 05-3F

Replacement tip for F series wands. Handles up to 8 inch (200 mm) wafers. This is a PCTFE tip for use with F series wands having an X or Z connection. Dimensions 34 x 31 mm, thickness 3.7 mm. M3 fitting. Note: type shown is similar (03-3F), PCTFE.

Part number: 05-PK

Replacement tip for F series wands. Handles up to 8 inch (200 mm) wafers. This is a PEEK tip for use with F series wands having an X or Z connection. Dimensions 34 x 31 mm, thickness 3.7 mm. M3 fitting. Note: similar type shown in PCTFE.

Part number: 05-VP

Replacement tip for F series wands. Handles up to 8 inch (200 mm) wafers. This is a Vespel tip for use with F series wands having an X or Z connection. Dimensions 34 x 31 mm, thickness 3.7 mm. M3 fitting. Note: similar type shown in PCTFE.

Part number: 09-3F

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a PCTFE tip for use with F series wands having an X or Z connection. Dimensions 30 x 26 mm, thickness 3.7 mm. M3 fitting.

Part number: 09-PK

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a PEEK tip for use with F series wands having an X or Z connection. Dimensions 30 x 26 mm, thickness 3.7 mm. M3 fitting.

Part number: 09-VP

Replacement tip for F series wands. Handles up to 6 inch (150 mm) wafers. This is a Vespel tip for use with F series wands having an X or Z connection. Dimensions 30 x 26 mm, thickness 3.7 mm. M3 fitting.

Part number: 14-3F

Replacement tip for Y type wands. PCTFE tip suitable for handling up to 8 inch (200 mm) wafers. PCTFE is similar to PTFE, having excellent properties for use in the clean room, such as low outgassing and resistance to chemicals. Note: image shows PEEK version.

Part number: 14-PK

Replacement tip for Y type wands. PEEK tip suitable for handling up to 8 inch (200 mm) wafers. PEEK has excellent properties for use in the clean room, such as low outgassing and resistance to chemicals.

Part number: 74-VP

Part number: 91-CP

Replacement tip for 6 inch (150 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 92-CP

Replacement tip for 8 inch (200 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 96-CP

Replacement tip for 6 inch (150 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 97-CP

Replacement tip for 8 inch (200 mm) wafer handling. ESD safe conductive PEEK (TIP ONLY).

Part number: 98-CP

Replacement tip for 8 inch (200 mm wafer handling). ESD safe conductive PEEK (TIP ONLY).

Part number: 658

Vertical wall mount holder for all normally open wands. Vacuum is isolated (switched off) while the wand is in the stand. Fixing is by self-adhesive pad, or alternatively this can be removed to use the two countersunk fixing holes. Material: acrylic resin.

Part number: 659

Horizontal desktop holder for all normally open wands. Vacuum is isolated (switched off) while the wand is in the stand. Material: acrylic resin.

Part number: 851-M

Black, coiled flexible tubing. Extends easily to over 2 m. Can be used with any wand. ESD safe when used with C series wands. 3 mm ID, 5 mm OD. Note that our wands accept both 3 and 4 mm ID tubing.

Part number: 851-L

Black, coiled flexible tubing. Extends easily to over 2 m. Can be used with any wand. ESD safe when used with C series wands. 4 mm ID, 6 mm OD. Note that our wands accept both 3 and 4 mm ID tubing.

Part number: FV-30-240

Datasheet

The FV-30 is our mid-range vacuum pump. It is capable of safely handling up to 6 inch (150 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. Supplied with 1 m clear flexible vacuum tubing.

• Flow rate 2.5 l/min (0.088 cfm)
• Ultimate pressure -300 mmHg (-40 kPa)
• Power supply 240 VAC
• Built in inlet and outlet HEPA filters
• Built in inlet and outlet HEPA filters
• Oil-free for cleanroom use
• Long term high reliability Designed to minimize noise generation
• Nylon body for static protection
• Compact design
• ESD Safe Tubing (Accessory)
• Static-Dissipative Grounding Kit (Accessory)
• HEPA Filter Kit (Replacement Part)
• Compliance with CE regulations
• HEPA filters trap 99.97% of all particles down to 0.3 microns
• The FIlter windows indicate when to change HEPA filters
• Gross weight: 860 g

Part number: FV-60-240

Datasheet

The FV-60 is our largest clean room vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil-free for use in the cleanroom and designed for long term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.

• Flow rate 2.5 l/min (0.088 cfm)
• Ultimate pressure –600 mmHg (–80 kPa)
• Power supply 240 Vac
• Built in inlet and outlet
• HEPA filters
• Nylon body for static protection
• Compact design
• ESD safe tubing (accessory)
• Static dissipative grounding kit (accessory)
• HEPA filter kit (replacement part)
• Compliance with CE regulations
• HEPA filters trap 99.97% of all particles down to 0.3 microns
• The filter windows indicate when to change HEPA filters
• Gross weight: 1400 g

Part number: 858

ESD grounding kit for all vacuum pumps.

Part number: 901

Vacuum wand tip condition tester. Wand tips can become less efficient with use if the contact surface deteriorates due to minute scratches, etc. This device can be used to check that the wand is performing correctly. The tip contact parts are made of PPS (polyphenylsulphide).