The FV-30 is our mid-range vacuum pump. It is capable of safely handling up to 6 inch (150 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. Supplied with 1 m clear flexible vacuum tubing.

• Flow rate: 2.5 l/min (0.088 cfm).
• Ultimate pressure: -300 mmHg (-40 kPa).
• Power supply: 240 VAC.
• Built-in inlet and outlet HEPA filters.
• Oil free for cleanroom use.
• Long-term high reliability.
• Designed to minimise noise generation.
• Nylon body for static protection.
• Compact design.
• ESD safe tubing (accessory).
• Static dissipative grounding kit (accessory).
• HEPA filter kit (replacement part).
• Compliance with CE regulations.
• HEPA filters trap 99.97% of all particles down to 0.3 microns.
• The filter windows indicate when to change HEPA filters.
• Gross weight including packaging: 860 g.
• Material: nylon.