The FV-60 is our largest cleanroom vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil free for use in the cleanroom and designed for long-term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.
Model | FV-60-110 |
Flow rate | 2.5 l/min (0.088 cfm) |
Ultimate pressure | -600 mmHg (-80 kPa) |
Power supply | 100-120 VAC |
Power consumption | 10.0 W |
Dimensions (D x W x H) 137 x 88 x 133 mm | |
Net weight | 1250 g |
Duty cycle | Continuous |
Life expectancy | > 8760 hours |
Wafer size | 8 and 12-inch (200 and 300 mm) |