FV-60-240
Clean room vacuum pump, 600 mmHg, 2.5 l/min, 240 V, HEPA
The FV-60 is our largest cleanroom vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil-free for use in the cleanroom and designed for long term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.
- Flow rate: 2.5 l/min (0.088 cfm).
- Ultimate pressure: -600 mmHg (-80 kPa).
- Power supply 240 VAC.
- Built-in inlet and outlet.
- HEPA filters.
- Nylon body for static protection.
- Compact design.
- ESD safe tubing (accessory).
- Static dissipative grounding kit (accessory).
- HEPA filter kit (replacement part).
- Compliance with CE regulations.
- HEPA filters trap 99.97% of all particles down to 0.3 microns.
- The filter windows indicate when to change HEPA filters.
- Gross weight including packaging: 1400 g.
- Material: nylon.
| Model | FV-60-240 |
| Flow rate | 2.5 l/min (0.088 cfm) |
| Ultimate pressure | -600 mmHg (-80 kPa) |
| Power requirement | 240 VAC |
| Power consumption | 10.0 W |
| Dimensions (D x W x H) | 137 x 88 x 133 mm |
| Net weight | 1250 g |
| Duty cycle | Continuous |
| Life expectancy | >8760 hours |
| Wafer size | 8 and 12 inch (200 and 300 mm) |
